ASM employees working as Senior Process Engineer I in US have attributed a compensation and benefits rating of 3.8 out of 5 stars, based on 27 ratings. This is 6% higher than the average of Senior Process Engineer I professionals at ASM worldwide.
The salary trajectory of a Senior Process Engineer I ranges between locations and employers. The salary starts at $117,911 per year (estimate) and goes up to $238,094 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Process Engineer I at ASM is $138,572 per year or $67 per hour, but some professionals have reported earning up to roughly $195,075 per year (90th percentile). The typical pay range is between $117,085 (25th percentile) and $166,177 (75th percentile) annually. This is based on 81 salaries submitted by ASM Senior Process Engineer I professionals on Glassdoor, as of Jul 2026.
Senior Process Engineer I professionals typically earn between $56 and $80 per hour.
Senior Process Engineer I professionals typically earn between $9,757 and $13,848 monthly.
