ASML employees working as Senior Software Design Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 2 ratings. This is in line with the average of Senior Software Design Engineer professionals at ASML worldwide.
The salary trajectory of a Senior Software Design Engineer ranges between locations and employers. The salary starts at $153,240 per year (estimate) and goes up to $384,636 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Software Design Engineer at ASML is $218,827 per year or $105 per hour, but some professionals have reported earning up to roughly $324,504 per year (90th percentile). The typical pay range is between $180,180 (25th percentile) and $270,081 (75th percentile) annually. This is based on 9 salaries submitted by ASML Senior Software Design Engineer professionals on Glassdoor, as of Jul 2026.
Senior Software Design Engineer professionals typically earn between $87 and $130 per hour.
Senior Software Design Engineer professionals typically earn between $15,015 and $22,507 monthly.