ASML employees working as Software Engineer in US have attributed a compensation and benefits rating of 3.1 out of 5 stars, based on 43 ratings. This is 22% lower than the average of Software Engineer professionals at ASML worldwide.
The salary trajectory of a Software Engineer ranges between locations and employers. The salary starts at $150,798 per year (estimate) and goes up to $370,613 per year (estimate) for the highest level of seniority.
The estimated average salary for a Software Engineer at ASML is $150,798 per year or $72 per hour, but some professionals have reported earning up to roughly $235,424 per year (90th percentile). The typical pay range is between $120,428 (25th percentile) and $191,332 (75th percentile) annually. This is based on 132 salaries submitted by ASML Software Engineer professionals on Glassdoor, as of Jul 2026.
Software Engineer professionals typically earn between $58 and $92 per hour.
Software Engineer professionals typically earn between $10,036 and $15,944 monthly.