The salary trajectory of a Senior Engineer ranges between locations and employers. The salary starts at $94,291 per year (estimate) and goes up to $378,443 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Engineer at MKS Instruments is $184,572 per year or $89 per hour, but some professionals have reported earning up to roughly $276,835 per year (90th percentile). The typical pay range is between $150,667 (25th percentile) and $229,132 (75th percentile) annually. This is based on 2 salaries submitted by MKS Instruments Senior Engineer professionals on Glassdoor, as of Jul 2026.
Senior Engineer professionals typically earn between $72 and $110 per hour.
Senior Engineer professionals typically earn between $12,556 and $19,094 monthly.