MKS Instruments employees working as Senior Optical Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 5 ratings. This is in line with the average of Senior Optical Engineer professionals at MKS Instruments worldwide.
The salary trajectory of a Senior Optical Engineer ranges between locations and employers. The salary starts at $0 per year (estimate) and goes up to $0 per year (estimate) for the highest level of seniority.
The estimated average salary for a Senior Optical Engineer at MKS Instruments is $192,929 per year or $93 per hour, but some professionals have reported earning up to roughly $298,980 per year (90th percentile). The typical pay range is between $154,837 (25th percentile) and $243,865 (75th percentile) annually. This is based on 4 salaries submitted by MKS Instruments Senior Optical Engineer professionals on Glassdoor, as of Jul 2026.
Senior Optical Engineer professionals typically earn between $74 and $117 per hour.
Senior Optical Engineer professionals typically earn between $12,903 and $20,322 monthly.
Optical Engineer with an estimated total pay of $100K - $136K/yr