How does the salary as Sr. Engineer at MKS Instruments compare with the base salary range for this job?

The average salary for Sr. Engineer is $169,929 per year (estimate) in US , which is 21% higher than the average MKS Instruments salary of $140,060 per year (estimate) for this job.

Are Sr. Engineer professionals at MKS Instruments in US satisfied with their compensation?

MKS Instruments employees working as Sr. Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 1 ratings. This is in line with the average of Sr. Engineer professionals at MKS Instruments worldwide.

What is the salary trajectory of a Sr. Engineer?

The salary trajectory of a Sr. Engineer ranges between locations and employers. The salary starts at $94,397 per year (estimate) and goes up to $378,875 per year (estimate) for the highest level of seniority.

How much does a Sr. Engineer make at MKS Instruments?

The estimated average salary for a Sr. Engineer at MKS Instruments is $169,929 per year or $82 per hour, but some professionals have reported earning up to roughly $261,205 per year (90th percentile). The typical pay range is between $136,865 (25th percentile) and $213,794 (75th percentile) annually. This is based on 1 salaries submitted by MKS Instruments Sr. Engineer professionals on Glassdoor, as of Jul 2026.

What is the typical salary for a Sr. Engineer per hour?

Sr. Engineer professionals typically earn between $66 and $103 per hour.

What is the typical salary for a Sr. Engineer per month?

Sr. Engineer professionals typically earn between $11,405 and $17,816 monthly.

What is the pay for job titles similar to Sr. Engineer at MKS Instruments?

Optomechanical Engineer - with an estimated total pay of $76K - $110K/yr, Engineering - with an estimated total pay of $85K - $146K/yr, Engineer - with an estimated total pay of $95K - $139K/yr, Engineering Manager - with an estimated total pay of $155K - $211K/yr

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MKS Instruments

Engaged Employer

All MKS Instruments salaries

Total salary range for MKS Instruments Sr. Engineer

Total Pay

$122K

$161K_/yr

About our data

Confident

Last updated Apr 10, 20251 Salaries submitted

Pay breakdown

$140K

Median total pay

Base Pay

93.1%

$115K - $148K/yr

$130K/yrmedian

Bonus

6.9%

$7K - $13K/yr

$10K/yrmedian

Deep dive into Pay

Recent salaries shared by Sr. Engineer at MKS Instruments

Job Title | Years of Experience

Total Pay

Base • Additional pay

Location

Date submitted

Job Title | Years of Experience

Location

Date submitted

Total Pay

Base • Additional pay

Anonymously share your salary to help the community.

Sr. Engineer

7-9 years

$114K - $132K/yr

Irvine, CA

submitted on Nov 14, 2024

$114K - $132K/yr

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MKS Instruments pay FAQs

The average salary for Sr. Engineer is $169,929 per year (estimate) in US, which is 21% higher than the average MKS Instruments salary of $140,060 per year (estimate) for this job.
MKS Instruments employees working as Sr. Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 1 ratings. This is in line with the average of Sr. Engineer professionals at MKS Instruments worldwide.
The salary trajectory of a Sr. Engineer ranges between locations and employers. The salary starts at $94,397 per year (estimate) and goes up to $378,875 per year (estimate) for the highest level of seniority.
The estimated average salary for a Sr. Engineer at MKS Instruments is $169,929 per year or $82 per hour, but some professionals have reported earning up to roughly $261,205 per year (90th percentile). The typical pay range is between $136,865 (25th percentile) and $213,794 (75th percentile) annually. This is based on 1 salaries submitted by MKS Instruments Sr. Engineer professionals on Glassdoor, as of Jul 2026.
Sr. Engineer professionals typically earn between $66 and $103 per hour.
Sr. Engineer professionals typically earn between $11,405 and $17,816 monthly.
- Optomechanical Engineer with an estimated total pay of $76K - $110K/yr
- Engineering with an estimated total pay of $85K - $146K/yr
- Engineer with an estimated total pay of $95K - $139K/yr
- Engineering Manager with an estimated total pay of $155K - $211K/yr

MKS Instruments pay & benefits MKS Instruments salaries MKS Instruments Sr. Engineer salaries

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All MKS Instruments salaries

Total salary range for MKS Instruments Sr. Engineer

Total Pay

$122K

$161K_/yr

About our data

Confident

Last updated Apr 10, 20251 Salaries submitted

Pay breakdown

$140K

Median total pay

Base Pay

93.1%

$115K - $148K/yr

$130K/yrmedian

Bonus

6.9%

$7K - $13K/yr

$10K/yrmedian

Deep dive into Pay

Top companies for "Compensation and Benefits" near you

3.9★Compensation & Benefits

Caterpillar

4.1★Compensation & Benefits

Johnson Controls

3.6★Compensation & Benefits

John Deere

4.0★Compensation & Benefits

MKS Instruments pay FAQs

The average salary for Sr. Engineer is $169,929 per year (estimate) in US, which is 21% higher than the average MKS Instruments salary of $140,060 per year (estimate) for this job.
MKS Instruments employees working as Sr. Engineer in US have attributed a compensation and benefits rating of 3 out of 5 stars, based on 1 ratings. This is in line with the average of Sr. Engineer professionals at MKS Instruments worldwide.
The salary trajectory of a Sr. Engineer ranges between locations and employers. The salary starts at $94,397 per year (estimate) and goes up to $378,875 per year (estimate) for the highest level of seniority.
The estimated average salary for a Sr. Engineer at MKS Instruments is $169,929 per year or $82 per hour, but some professionals have reported earning up to roughly $261,205 per year (90th percentile). The typical pay range is between $136,865 (25th percentile) and $213,794 (75th percentile) annually. This is based on 1 salaries submitted by MKS Instruments Sr. Engineer professionals on Glassdoor, as of Jul 2026.
Sr. Engineer professionals typically earn between $66 and $103 per hour.
Sr. Engineer professionals typically earn between $11,405 and $17,816 monthly.
- Optomechanical Engineer with an estimated total pay of $76K - $110K/yr
- Engineering with an estimated total pay of $85K - $146K/yr
- Engineer with an estimated total pay of $95K - $139K/yr
- Engineering Manager with an estimated total pay of $155K - $211K/yr

Glassdoor

About / Press
Awards
Blog
Research
Contact Us
Guides

Employers

Free Employer Account
Employer Center
Employers Blog

Information

Help
Guidelines
Terms of Use
Privacy & Ad Choices
Do Not Sell Or Share My Information
Cookie Consent Tool
Security

Work With Us

Advertisers
Careers

Download the App

Browse by:
Companies
Jobs
Locations
Communities
Recent Posts