Recent salaries shared by Technical Program Manager at Onto Innovation
Job Title | Years of Experience
Total Pay
Base • Additional pay
Location
Date submitted
Job Title | Years of Experience
Location
Date submitted
Total Pay
Base • Additional pay
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Onto Innovation pay FAQs
- The average salary for Technical Program Manager is $162,072 per year (estimate) in US, which is 4% lower than the average Onto Innovation salary of $169,334 per year (estimate) for this job.
- The salary trajectory of a Technical Program Manager ranges between locations and employers. The salary starts at $142,858 per year (estimate) and goes up to $243,264 per year (estimate) for the highest level of seniority.
- The estimated average salary for a Technical Program Manager at Onto Innovation is $162,072 per year or $78 per hour, but some professionals have reported earning up to roughly $249,067 per year (90th percentile). The typical pay range is between $130,570 (25th percentile) and $203,889 (75th percentile) annually. This is based on 3 salaries submitted by Onto Innovation Technical Program Manager professionals on Glassdoor, as of Jul 2026.
- Technical Program Manager professionals typically earn between $63 and $98 per hour.
- Technical Program Manager professionals typically earn between $10,881 and $16,991 monthly.
