Tokyo Electron employees working as Software Applications Engineer in US have attributed a compensation and benefits rating of 4 out of 5 stars, based on 2 ratings. This is in line with the average of Software Applications Engineer professionals at Tokyo Electron worldwide.
The salary trajectory of a Software Applications Engineer ranges between locations and employers. The salary starts at $118,407 per year (estimate) and goes up to $280,316 per year (estimate) for the highest level of seniority.
The estimated average salary for a Software Applications Engineer at Tokyo Electron is $148,312 per year or $71 per hour, but some professionals have reported earning up to roughly $211,511 per year (90th percentile). The typical pay range is between $124,417 (25th percentile) and $179,117 (75th percentile) annually. This is based on 9 salaries submitted by Tokyo Electron Software Applications Engineer professionals on Glassdoor, as of Jul 2026.
Software Applications Engineer professionals typically earn between $60 and $86 per hour.
Software Applications Engineer professionals typically earn between $10,368 and $14,926 monthly.